Dummy Fill, Cheese, Block Fill and Block Cheese

Dummy Fill, Cheese, Block Fill and Block Cheese

Dummy fill and cheese are data prep techniques used by a foundry to help normalize the density of structures across the wafer for topography control. The designer does not need to do anything for these structures but should be aware. The descriptions below are from slides 32 and 33 of the design guide.

Dummy Fill Details

  1. SUNY Poly will place dummy fill shapes for uniformity/process control
    1. Fill shapes on all levels will automatically avoid any waveguide shape by 7 microns
    2. There is no need to draw "block fill" (BxxAMFILL) shapes over waveguides
    3. If fill needs to be more than 7 micron from a waveguide or in other instances this can be accomplished with BxxAMFILL
    4. BxxAMFILL should be kept to a minimum



Cheese Details

  1. SUNY Poly will break up large metal shapes (cheese) for uniformity/process control
    1. Auto-cheese can be blocked if required with BxxAMCHE
    2. Cheese shapes will avoid drawn vias
    3. BxxAMCHE should be kept to a minimum